MIM2010 Fabrication of Micro-structured Parts by Nano-Imprint Lithography
Fabrication of Micro-structured Parts by Nano-Imprint Lithography Sacrificial Plastic Mold Insert MIM using Nanoscale Copper Powder
International Conference on Injection Molding of Metal, Ceramics and Carbides (MIM2010)
This study aims to develop the manufacturing method of micro-structured parts by the metal powder injection molding (MIM) inserted micro-sacrificial plastic molds which were prepared by nano-imprint lithography (NIL) technique. In this process named NIL/μ-SPiMIM, the feedstock composed of nanoscale copper powder and polyacetal-based binder was adequately prepared and molded into polymethylmethacrylate films with fine line-scan structures, and it was sintered in a reductive gas atmosphere followed by solvent debinding of the films. The filling rate of feedstock into micro-channels and transcriptional property in sintered parts was evaluated by cross-sectional SEM observation. The experimental results revealed reasonable evidences using nanoscale powder could sinter at lower temperature but was not easily full-filled the feedstock into narrow cavity molds. It can be concluded that the manufacturing method named NIL/μ-SPiMIM proposed in this study has great potential to produce precisely 3 dimensional complex metallic parts with the micro-structures.